독성 가스 데이터 Ordering Information
| 표준명명 | 화학식 | 인체 허용농도 | 비중(공기= 1) |
| Acetic Acid | CH3COOH | 10ppm | 2.07 |
Ammonia | NH3 | 25ppm | 0.6 |
Arsine | AsH3 | 0.1ppm | 2.7 |
| Boron Trichloride | BCl3 | 5ppm | 4.07 |
| Boron Trifluoride | BF3 | 3ppm | 2.38 |
| Bromine | Br2 | 0.1ppm | 5.5 |
| Carbon Monoxide | CO | 25ppm | 0.968 |
| Chlorine | Cl2 | 1ppm | 2.49 |
| Diborane | B2H6 | 0.1ppm | 0.96 |
| Dichlorosilane (DCS) | H2Cl2Si | 5ppm | 3.51 |
| Disilane | Si2H6 | 5ppm | |
| Ethylene Oxide | C2H4O | 1ppm | 1.52 |
| Fluorine | F2 | 1ppm | 1.312 |
| Germane | GeH4 | 0.2ppm | 2.66 |
| Hydrazine | N2H4 | 0.1ppm | 1.011 |
| Hydrogen | H2 | 0.07 | |
| Hydrogen Bromide | HBr | 3ppm | 2.812 |
| Hydrogen Chloride | HCL | 5ppm | 1.27 |
| Hydrogen Cyanide | HCN | 10ppm | 0.941 |
| Hydrogen Fluoride | HF | 3ppm | 0.7 |
| Hydrogen Selenide | H2Se | 0.05ppm | 2.81 |
| Hydrogen Sulfide | H2S | 10ppm | 1.19 |
| Nitric Acid | HNO3 | 2ppm | 3.2 |
| Nitrogen Monoxide | NO | 25ppm | 1.53 |
| Nitrogen Dioxide | NO2 | 3ppm | 1.58 |
| Nitrogen Tetraoxide | N2O4 | 3ppm | |
| Oxygen | O2 | 1.11 | |
| Ozone | O3 | 0.1ppm | 1.65 |
| Phosphine | PH3 | 0.3ppm | 1.18 |
| Phosphorus Oxychloride | POCI3 | 5ppm | 5.3 |
| Phosphorus Pentafluoride | PF5 | 3ppm | 4.46 |
| Phosphorus Trichloride | PCI3 | 0.2ppm | 4.77 |
| Silane | SiH4 | 5ppm | 1.11 |
| Silicon Tetrachloride | SiCl4 | 5ppm | 5.9 |
| Silicon Tetrafluoride | SiF4 | 3ppm | 3.61 |
| Sulfur Dioxide | SO2 | 2ppm | 2.26 |
| Sulfur Tetrafluoride | SF4 | 0.1ppm | |
| Tantalum Fluoride | TaF5 | 3ppm | |
| Tin Tetrachloride | SnCL4 | 5ppm | |
| Titanium Fluoride | TiF4 | 3ppm | |
| Titanium Tetrachloride | TiCL4 | 5ppm | 6.6 |
| Trichlorosilane | SiHCL3 | 5ppm | 4.7 |
| Tungsten Hexafluoride | WF6 | 3ppm | 10.6 |
| Trimethoxy Boron (TMB) | B(OCH3)3 | 200ppm | |
| Trimethyl Phosphite (TMP) | P(OCH3)3 | 2ppm | |
| Tetraethoxy Silane (TEOS) | Si(OC2H5)4 | 10ppm | 0.936 |
| Difluoro Methane | CH2F2 | 1000ppm | 1.8 |
| Sulfur Hexafluoride | SF6 | 1000ppm | 5-6.602 |
| Nitrogen Trifuoride | NF3 | 10ppm | 2.46 |
| Nitrous Oxide | N2O | 50ppm | 1.53 |
| Carbon Dioxide | CO2 | 5000ppm | 1.5 |
| Phosgen | COCL2 | 0.1ppm | 3.4 |
| Methyl Ethyl Ketone | CH3COCH2CH3 | 200ppm | 2.5 |
| Tetrafluoromethane | CF4 | 3.05 | |
| Dichlorodifluoromethane | CCL2F2 | 1000ppm | 4.2 |
| Octafluorocyclobutane | C4F8 | 7.33 | |
| Fluoroform | CHF3 | 2.417 |
